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e-beam [2012/11/29 09:46]
landon
e-beam [2012/11/29 09:47] (current)
landon
Line 27: Line 27:
   * Open the chamber and collect your samples   * Open the chamber and collect your samples
   * Shutting down the system   * Shutting down the system
-    * Close the chamber and click //Pump chamber to high vac// +    * Close the chamber and click //Shut down system//
-    * Open the //manual controls// when the chamber pressure reaches <50 mTorr +
-      * To open //manual controls//: click //No// in the //manual controls// box, followed by //manual override// button +
-    * In the //manual controls// box ensure that the //rough valve// and //high vac valve// are closed (deselected). +
-    * Ensure that the //foreline valve// is open (selected) +
-    * Deselect //diffusion pump// to turn off the diffusion pump +
-    * Wait ~15-20 min while the diffusion pump cools down +
-    * Close (deselect) the //foreline valve// +
-    * Turn off (deselect) the //rough pump// +
-    * Close out of the LabVIEW code by pressing the red //abort// button in the upper left corner. +
-      * Say //no// if you are asked to //save changes// +
  
 ===Substrate heater === ===Substrate heater ===

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