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eric_sundholm_s_recipe [2008/07/15 08:36]
landon
eric_sundholm_s_recipe [2009/08/05 15:28] (current)
ethanminot
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 ====== Eric Sundholm'​s Recipe ====== ====== Eric Sundholm'​s Recipe ======
-Eric is an EE grad student who used to TA the ECE418 class on semiconductor processing & has made hundreds ​of devices in the Owen clean room. His advice should be heeded.+**WARNING: Manufacturer'​s recommended softbake is 115 C for 60 s on a hotplate. The manufacturer does not recommend baking inbetween exposuring/​developing. Such bakes are only used for the more modern '​chemically amplified photoresists'​. See Ethan for the 1800 series datasheet.** 
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 +Eric is an EE grad student who used to TA the ECE418 class on semiconductor processing & has made lots of devices in the Owen clean room.
  
 **SiO2 Wet Etching** **SiO2 Wet Etching**

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