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fine_tuning [2009/09/18 17:27]
leydenm
fine_tuning [2009/09/18 17:28] (current)
leydenm
Line 116: Line 116:
   *LOR-B: 0.5 - >1 micron undercut (0.24 Normality)   *LOR-B: 0.5 - >1 micron undercut (0.24 Normality)
  
-We purchased LOR-B ($391 per bottle). The microscope cross-sectional image below shows 1300 nm of S1813 on top of 350 nm of LOR-B on top of Si/SiO2 wafer. The undercut came out about right. We were aiming for between 0.5 and 1 microns. The bake temp is 190 and the develop time is 20 sec in CD 26+We purchased LOR-B ($391 per bottle). The microscope cross-sectional image below shows 1300 nm of S1813 on top of 350 nm of LOR-B on top of Si/SiO2 wafer. The undercut came out about right. We were aiming for between 0.5 and 1 microns. The bake 190C for 2min with a 2nd bake of S1813 on top at 115 for 2min. The develop time is 20 sec in CD 26
  
 {{:​lor_undercut_500pix.jpg|}} {{:​lor_undercut_500pix.jpg|}}
  
 *//Info from the the technical support at Microchem.//​ *//Info from the the technical support at Microchem.//​

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