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mceuen_recipes [2009/06/12 14:21]
ethanminot created
mceuen_recipes [2009/09/16 16:22] (current)
ethanminot
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 Carefully place the chip in a warm DI water bath for one hour. Do not flow water over the chip or otherwise disturb it, as that can cause the film to release from the surface. Let the chip air-dry. You will notice that the NT/Au film will be mostly free of PVA, and will look as though it was evaporated onto your new surface rather than just being placed on top. Carefully place the chip in a warm DI water bath for one hour. Do not flow water over the chip or otherwise disturb it, as that can cause the film to release from the surface. Let the chip air-dry. You will notice that the NT/Au film will be mostly free of PVA, and will look as though it was evaporated onto your new surface rather than just being placed on top.
  
-Run the dry chip through an oxygen clean for 10-30 minutes (150 mtorr, 20 sccm, 150W).+Run the dry chip through an oxygen clean for 10-30 minutes (150 mtorr, 20 sccm, 150W). (I've tried skipping the O2 clean but we get a lot of PVA residue left on the surface, and the gold won't even come off all the way because it's being shielded and you are left with a lot of PVA gunk on your tubes). After removal of PVA the gold usually looks pretty much like an evaporated layer.
  
 Place the clean chip in gold etchant (TFA) for two minutes. Rinse with water. Place the clean chip in gold etchant (TFA) for two minutes. Rinse with water.

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