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oxygen_plasma [2008/08/15 21:46]
ethanminot
oxygen_plasma [2008/09/25 17:09] (current)
ethanminot
Line 1: Line 1:
 ====== Oxygen plasma cleaning ====== ====== Oxygen plasma cleaning ======
 +
 +====O2 Plasma in Owen Hall Clean Room====
 +Matt is qualified to use this O2 plasma machine. It etch S1813 Photoresist at approximately 100 nm/s. A typical recipe for ashing (cleaning off photoresist residue after development) is 30 seconds. ​
 +
 +====Commercially available O2 plasma system====
  
 Xinjian requested a quote from [[http://​www.harrickplasma.com|Harrick Plasma]] a few months back, the same company used in McEuen lab. This is the one in Paul's lab. Xinjian requested a quote from [[http://​www.harrickplasma.com|Harrick Plasma]] a few months back, the same company used in McEuen lab. This is the one in Paul's lab.

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