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silicon_wafers [2008/05/28 16:00]
ethanminot
silicon_wafers [2012/07/03 16:04] (current)
ethanminot
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 ====== Silicon wafers ====== ====== Silicon wafers ======
  
-We current use p+ doped silicon with 200 nm thermally grown oxide. The crystallographic axis of the surface ​normal ​is ...+We current use p+ doped silicon, [1 0 0] with 200 nm thermally grown oxide. The [1 0 0] refers to the crystallographic axis of the vector ​normal ​to the surface[1 0 0] wafers will break into squares.
  
 There are 3 wafer grades: test (lowest grade), prime and epi (highest grade). There are 3 wafer grades: test (lowest grade), prime and epi (highest grade).
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 Philip Kim's approach: (might not be available anymore due to cuts in federal funding) Buy wafers from Mems-exchange. They allow you to buy as few wafers as you want, you can choose all the parameters in the process and the facility to be used. That way, he would try around some recipes for a few wafers at a time until finding something he was happy with, then buy in batches of 10 or so every time. It costs considerably more money but he gets better yield of good wafers and doesn'​t waste the money on 25 bad wafers if the bacth happens to be bad.  Philip Kim's approach: (might not be available anymore due to cuts in federal funding) Buy wafers from Mems-exchange. They allow you to buy as few wafers as you want, you can choose all the parameters in the process and the facility to be used. That way, he would try around some recipes for a few wafers at a time until finding something he was happy with, then buy in batches of 10 or so every time. It costs considerably more money but he gets better yield of good wafers and doesn'​t waste the money on 25 bad wafers if the bacth happens to be bad. 
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